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Proceedings Paper

Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors
Author(s): Eui-Hyeok Yang; Kirill Shcheglov; Susan Trolier-McKinstry
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Paper Abstract

Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane “transferred” in its entirety from a separate wafer. This process allows the large-stroke actuation of the continuous membrane and can provide the necessary large wavefront correction. The micromachined deformable mirror approach allows mass-production of actuators as well as scalable structures with, high actuator densities. The piezoelectric unimorph actuator design approach delivers large actuator stroke with a highly localized influence function, while maintaining a surface figure of optical quality. Both of these component fabrication techniques are easily scaled to accommodate deformable mirrors with very large areas.

Paper Details

Date Published: 20 January 2003
PDF: 8 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); doi: 10.1117/12.473715
Show Author Affiliations
Eui-Hyeok Yang, Jet Propulsion Lab. (United States)
Kirill Shcheglov, Jet Propulsion Lab. (United States)
Susan Trolier-McKinstry, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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