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Proceedings Paper

Application of digital holographic microinterferometer for microelements testing
Author(s): Leszek A. Salbut; Agata Jozwicka; Pawel Dymerski; Michal Jozwik
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Paper Abstract

Competitive trends to miniaturize Micro Electro Mechanical (and Optical) Systems (MEMS, MOEMS), electronic components and assemblies introduce unprecedented requirements concerning their design, manufacturing and testing. The paper presents a concept of digital holographic microinterferometrer (DHMI) for microelement deformation testing. DHMI may provide all components of the displacement vector and work with reflecting and scattering surfaces of object under test. For numerical reconstruction of digitally stored holograms a new method based on the sphere transformation theory is applied. It significantly simplifies the analyses in comparison with a conventional method directly based on the Fresnel approach. The algorithms proposed enable fast and high accuracy measurements. In the paper the practical realization of DHMI is presented. The measurement methodology is shown on the example of deformation testing of pressure loaded silicon micromembranes. The results were used for verification of micromembrane modeling by FEM.

Paper Details

Date Published: 19 June 2002
PDF: 7 pages
Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473569
Show Author Affiliations
Leszek A. Salbut, Warsaw Univ. of Technology (Poland)
Agata Jozwicka, Warsaw Univ. of Technology (Poland)
Pawel Dymerski, Warsaw Univ. of Technology (Poland)
Michal Jozwik, Warsaw Univ. of Technology (France)

Published in SPIE Proceedings Vol. 4778:
Interferometry XI: Applications
Wolfgang Osten, Editor(s)

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