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Proceedings Paper

In-plane displacement measurement using ESPI based on spatial fringe analysis method
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Paper Abstract

The speckle interferometry is used to measure the shape of an object with a rough surface. In particular, the precise measurement can be easily performed with ESPI using fringe scanning technology. Then, the measurement accuracy is influenced with the ratio between the speckle size and the pixel size of a CCD. Sometimes, this causes the problem concerning an optical dislocation. In this paper, an in-plane displacement is measured by the arrangement using the two collimated beams. The measurement is performed by ESPI technology with the spatial fringe analysis method under the optimal condition. The condition is discussed as the measurement parameters concerning the speckle's size and the passband of band pass filter. In the experiment of the measurement of in-plane displacement, the optimal condition can evade the problem of occurrence of optical displacements. At the same time, the precise measurement can be performed.

Paper Details

Date Published: 19 June 2002
PDF: 8 pages
Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473555
Show Author Affiliations
Yasuhiko Arai, Kansai Univ. (Japan)
Shunsuke Yokozeki, Kyushu Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 4778:
Interferometry XI: Applications
Wolfgang Osten, Editor(s)

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