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Proceedings Paper

Absolute distance measurements using FTPSI with a widely tunable IR laser
Author(s): Leslie L. Deck
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Paper Abstract

Fourier transform phase-shifting interferometry is further developed and applied to the absolute measurement of interferometer cavities. Using a widely tunable IR laser diode initially developed for telecom applications along with specific interferometer cavities, I apply this new capability to the measurement of absolute cavity lengths, where a 1-(sigma) precision of 12.6 ppb is demonstrated and the technique was then used to determinate the absolute index and thickness of a transparent parallel plate.

Paper Details

Date Published: 19 June 2002
PDF: 9 pages
Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473544
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 4778:
Interferometry XI: Applications
Wolfgang Osten, Editor(s)

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