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Proceedings Paper

Characterization of the frequency-modulated continuous wave subsystem of an angstrom-accuracy absolute interferometer
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Paper Abstract

An external cavity diode laser is used as source for a frequency modulated continuous wave (FMCW) interferometer intended to determine absolute optical path differences (OPD) of up to 3mm with a target accuracy of 0.3 microns. This interferometer will eventually be paired with a heterodyne interferometer to extend the accuracy of the system to 0.1nm. Rather than using injection current modulation for the FMCW subsystem, the frequency sweep is provided by moving a mirror of the external cavity with a piezo element. A noise source analysis for this particular setup is provided, and estimates of the maximum attainable accuracy are made.

Paper Details

Date Published: 19 June 2002
PDF: 11 pages
Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473536
Show Author Affiliations
Lukas Max Krieg, Technische Univ. Delft (Netherlands)
Bas L. Swinkels, Technische Univ. Delft (Netherlands)
Joseph J. M. Braat, Technische Univ. Delft (Netherlands)

Published in SPIE Proceedings Vol. 4778:
Interferometry XI: Applications
Wolfgang Osten, Editor(s)

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