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Proceedings Paper

Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler
Author(s): Peter J. de Groot; Xavier Colonna de Lega; David A. Grigg
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Paper Abstract

We describe techniques for measuring step heights between separated, nominally plane-parallel surface regions of a precision-engineered part. Our technique combines a broadband, 10-micron wavelength scanning interferometric profiler with a HeNe laser displacement gage. The infrared wavelength accommodates machined metal parts having a surface roughness in excess of what would be possible with a visible-wavelength interferometer. The combination of broadband interferometry, which removes fringe order ambiguity, with a laser displacement gage makes it possible to determine the relative heights of surfaces separated by several mm with a 2-σ uncertainty of 0.3 micron. We present the instrument theory, experimental implementation and results of instrument testing.

Paper Details

Date Published: 19 June 2002
PDF: 4 pages
Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473535
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Xavier Colonna de Lega, Zygo Corp. (United States)
David A. Grigg, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 4778:
Interferometry XI: Applications
Wolfgang Osten, Editor(s)

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