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Proceedings Paper

Fabrication of a porous membrane for gas precombustion
Author(s): Joerg Stuermann; Andre Boedecker; Alexandra Splinter; Wolfgang Benecke
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Paper Abstract

This paper presents a micro reactor, which consists of a permeable membrane fabricated by silicon micro machining technology. The fabrication process is a combination of anisotropic silicon etching (wet etching and dry etching) and porous silicon technology. To avoid a reaction chamber with a high dead volume, we have realised a permeable membrane in conjunction with porous silicon to achieve a high surface to volume ratio, impregnated with palladium or platinum. For the activation of the heterogeneous reaction on the surface of the catalytic material a heating element around the permeable membrane, which is thermally decoupled with a porous silicon well of the surrounding bulk material is realised. The gas flows through the membrane and reacts during the passing time. The reaction time for gases depends on the membrane thickness and the active surface of the porous silicon. The application is the integration into a gas analysing system combined with a gas sensor array, a gas chromatographic system, microvalves, and calibration units mounted all on a pneumatic motherboard.

Paper Details

Date Published: 15 January 2003
PDF: 8 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.473377
Show Author Affiliations
Joerg Stuermann, Univ. of Bremen (Germany)
Andre Boedecker, Univ. of Bremen (Germany)
Alexandra Splinter, Hella KG Hueck & Co. (Germany)
Wolfgang Benecke, Univ. of Bremen (Germany)

Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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