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Proceedings Paper

New results on proton nuclear magnetic resonance of a-SiN:H films
Author(s): Ji Shen Wang; Chun Fang Xu
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Paper Abstract

In this paper, results of proton magnetic resonance for hydrogenated amorphous silicon nitrides (PECVD a-SiN:H) films are presented. The results are different from those previously reported by other authors.

Paper Details

Date Published: 1 November 1991
PDF: 3 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47337
Show Author Affiliations
Ji Shen Wang, East China Normal Univ. (China)
Chun Fang Xu, East China Normal Univ. (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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