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Proceedings Paper

UV-curable polymers with chemically-bonded carbon nanotubes for MEMS applications
Author(s): Jining Xie; Nanyan Zhang; Manton Guers; Vijay K. Varadan
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Paper Abstract

Current ultraviolet (UV) curable polymer techniques for MEMS fabrication pose certain challenges due to the electrical and mechanical properties of the polymer. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified threestep in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. X-ray photoelectron spectroscopy (XPS) was used to identify the —OH and —COOH groups attached to nanotube surface. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between —NCO groups of TDI and —OH, -COOH groups of functionalized nanotubes were confirmed by Fourier transform infrared (FTIR) spectra. This new UV-curable polymer is expected to be a costeffective solution with a variety of applications in UV coating, phase shifters for telecommunications and global positioning systems, and polymer and BioMEMS devices.

Paper Details

Date Published: 14 November 2002
PDF: 11 pages
Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.473338
Show Author Affiliations
Jining Xie, The Pennsylvania State Univ. (United States)
Nanyan Zhang, The Pennsylvania State Univ. (United States)
Manton Guers, The Pennsylvania State Univ. (United States)
Vijay K. Varadan, The Pennsylvania State Univ. (United States)

Published in SPIE Proceedings Vol. 4935:
Smart Structures, Devices, and Systems
Erol C. Harvey; Derek Abbott; Vijay K. Varadan, Editor(s)

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