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Proceedings Paper

Investigation into the response of a micro-electro-mechanical compound pivot mirror using finite element modeling
Author(s): Fawn R. Gass; Jeffrey L. Dohner; Olga Blum Spahn; Ernest J. Garcia; Grant D. Grossetete
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Paper Abstract

This report presents modeling and simulation work for analyzing three designs of Micro Electro Mechanical Systems (MEMS) Compound Pivot Mirrors (CPM). These mirrors were made using the polysilicon SUMMiTTM process. At 75 volts and above, initial experimental analysis of fabricated mirrors showed tilt angles of up to 75 degrees for one design, and 5 degrees for the other two. Nevertheless, geometric design models predicted higher tilt angles. Therefore, a detailed finite element modeling study was conducted to explain why lower tilt angles occurred and if design modifications could bemade to produce higher tilt angles at lower voltages. This study showed that the spring stiffness of the mirrors was too great to allow for desired levels of rotation at lower levels of voltage. To create lower spring stiffness, a redesign is needed.

Paper Details

Date Published: 25 July 2003
PDF: 9 pages
Proc. SPIE 4986, Physics and Simulation of Optoelectronic Devices XI, (25 July 2003); doi: 10.1117/12.473200
Show Author Affiliations
Fawn R. Gass, Sandia National Labs. (United States)
Jeffrey L. Dohner, Sandia National Labs. (United States)
Olga Blum Spahn, Sandia National Labs. (United States)
Ernest J. Garcia, Sandia National Labs. (United States)
Grant D. Grossetete, L&M Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 4986:
Physics and Simulation of Optoelectronic Devices XI
Marek Osinski; Hiroshi Amano; Peter Blood, Editor(s)

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