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Proceedings Paper

Amorphous silicon thin film x-ray sensor
Author(s): Guang-Pu Wei
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Paper Abstract

Three kinds of amorphous silicon x-ray sensors have been developed. The structures together with some basic characteristics of these sensors are reported. As an example of application, some operational tests for x-ray computed tomography (XCT) have been carried out. The results show that these sensors may provide a variety of potential applications in medical, scientific, and industrial fields.

Paper Details

Date Published: 1 November 1991
PDF: 9 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47313
Show Author Affiliations
Guang-Pu Wei, Shanghai Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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