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Proceedings Paper

Diamond-like carbon thin films prepared by rf-plasma CVD
Author(s): Jie Jiang; Chen Zan Liu
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Paper Abstract

The depositing process, growing rate, structure, and optical properties of Diamondlike Carbon (DLC) films have been studied. It's shown that in the DLC films approximating amorphous carbon and diamond coexist from TED and Raman spectra, and the IR absorption is very low in 2.5 - 14.0 micrometers wavelength range from IR spectrophotometer. The other properties of this films such as chemical, thermal stability, mechanical, and adhesion are discussed. Finally, efficient, durable antireflection and protective coatings on IR optics are described.

Paper Details

Date Published: 1 November 1991
PDF: 8 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47311
Show Author Affiliations
Jie Jiang, Kunming Institute of Physics (China)
Chen Zan Liu, Kunming Institute of Physics (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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