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Proceedings Paper

Properties and applications of ferroelectric and piezoelectric thin films
Author(s): Tadashi Shiosaki
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Paper Abstract

Polar axis oriented films are important in piezoelectric, pyroelectric, optic, and ferroelectric applications. The applications of polar axis oriented films are reviewed. An acousto-optic deflector made of ZnO thin film optics and Si Schottky diode photo-detectors integrated on a Si substrate is described. The properties mainly related to the integrated memory applications of polar axis oriented ferroelectric films grown by reactive magnetron sputtering are reported.

Paper Details

Date Published: 1 November 1991
PDF: 10 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47310
Show Author Affiliations
Tadashi Shiosaki, Kyoto Univ. (Japan)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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