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Proceedings Paper

Finite element study on indentations into TiN- and multiple TiN/Ti- layers on steel
Author(s): H. F. Wang; A. Wagendristel; X. Yang; P. Torzicky; H. Bangert
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Paper Abstract

A state-of-the-art finite element program (MARCTM) is used to derive as much information as possible from the simulation of a 136 degree(s) wedge indentation into multilayer systems. The deformed specimen is compared with experimentally found results as far as an experiment, i.e., a hardness indentation, yields measurable parameters. We suppose some of the surplus information obtained by the simulation to be reliable as well. A first step is undertaken toward the aim of obtaining elastic constants from a hardness or load-depth measurement in multi-phase films.

Paper Details

Date Published: 1 November 1991
PDF: 6 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47308
Show Author Affiliations
H. F. Wang, Technical Univ. of Vienna (Austria)
A. Wagendristel, Technical Univ. of Vienna (Austria)
X. Yang, Technical Univ. of Vienna (Austria)
P. Torzicky, Technical Univ. of Vienna (Austria)
H. Bangert, Technical Univ. of Vienna (Austria)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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