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Proceedings Paper

Optical properties of some ion-assisted deposited oxides
Author(s): F. Andreani; S. Luridiana; Shuzheng Mao
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Paper Abstract

The refractive index of several high index oxide films obtained with ion assisted deposition (IAD) is studied as a function of some ion bombardment parameters. The oxygen/metal ratio of the films obtained with one material (Ta2O5) is also studied. All experiments have been performed on a commercially available large scale production machine.

Paper Details

Date Published: 1 November 1991
PDF: 5 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47303
Show Author Affiliations
F. Andreani, SATIS-OMSAG (Italy)
S. Luridiana, SATIS-OMSAG (Italy)
Shuzheng Mao, Shanghai Optical Instrument Factory (China)

Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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