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Proceedings Paper

Generalized ellipsometry of complex mediums in layered systems
Author(s): Mathias Schubert; Alexander Kasic; Tino Hofmann; Volker Gottschalch; Juergen Off; Ferdinand Scholz; Eva Schubert; Horst Neumann; Ian J. Hodgkinson; Matthew D. Arnold; Wayne A. Dollase; Craig M. Herzinger
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Paper Abstract

A new global approach, called 'Generalized Ellipsometry', is now capable to characterize the optical and structural properties of general anisotropic layered systems, including absorption, and can be applied, in general, to determine the linear response tensor elements for wavelengths from the far IR to the deep UV. This technique enables new insights into physical phenomena of layered anisotropic mediums, and can provide precise structural and optical data of novel compound materials. Experimental results are presented for stibnite single crystals as example for an arbitrary biaxial absorbing material, a wurtzite GaN thin film with uniaxial anisotropy grown on sapphire, a spontaneously atomically ordered III-V semiconductor alloy thin film, and a sculptured titanium dioxide film with symmetrically dielectric tensor properties.

Paper Details

Date Published: 24 June 2002
PDF: 13 pages
Proc. SPIE 4806, Complex Mediums III: Beyond Linear Isotropic Dielectrics, (24 June 2002); doi: 10.1117/12.472993
Show Author Affiliations
Mathias Schubert, Univ. Leipzig and Univ. of Nebraska/Lincoln (Germany)
Alexander Kasic, Univ. Leipzig and Univ. of Nebraska/Lincoln (Germany)
Tino Hofmann, Univ. Leipzig and Univ. of Nebraska/Lincoln (United States)
Volker Gottschalch, Univ. Leipzig (Germany)
Juergen Off, Univ. Stuttgart (Germany)
Ferdinand Scholz, Univ. Stuttgart (Germany)
Eva Schubert, Institut fuer Oberflaechenmodifizierung (Germany)
Horst Neumann, Institut fuer Oberflaechenmodifizierung (Germany)
Ian J. Hodgkinson, Univ. of Otago (New Zealand)
Matthew D. Arnold, Univ. of Otago (New Zealand)
Wayne A. Dollase, Univ. of California/Los Angeles and Univ. Bayreuth (United States)
Craig M. Herzinger, J.A. Woollam Co. (United States)


Published in SPIE Proceedings Vol. 4806:
Complex Mediums III: Beyond Linear Isotropic Dielectrics
Akhlesh Lakhtakia; Graeme Dewar; Martin W. McCall, Editor(s)

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