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Proceedings Paper

Sensitivity and selectivity enhancement in semiconductor gas sensors
Author(s): Makoto Egashira; Yasuhiro Shimizu
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Paper Abstract

To date numerous efforts have been made to enhance the sensitivity and selectivity of semiconductor gas sensors to a specific gaseous component. Advantages of these modifications will be discussed in terms of the principle factors in physics and chemistry that are associated with the gas-sensing mechanism of semiconductor gas sensors.

Paper Details

Date Published: 1 November 1991
PDF: 10 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47297
Show Author Affiliations
Makoto Egashira, Nagasaki Univ. (Japan)
Yasuhiro Shimizu, Nagasaki Univ. (Japan)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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