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Proceedings Paper

Multicomponent electric-arc source of metallic plasma
Author(s): Dmitriy A. Karpov; S. N. Nazikov
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Paper Abstract

Results of studies carried out during development of a metallic plasma multicomponent electric-arc source and containing eight independently operating cathodes are described. Structural scheme of the developed device and technical characteristics are represented.

Paper Details

Date Published: 1 November 1991
PDF: 7 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47293
Show Author Affiliations
Dmitriy A. Karpov, D. V. Efremov Institute of Electrophysical Apparatus (Russia)
S. N. Nazikov, D. V. Efremov Institute of Electrophysical Apparatus (Russia)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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