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Proceedings Paper

High-speed gray-scale laser direct-write technology for micro-optic fabrication
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Paper Abstract

Binary Laser Direct-Write (LDW) raster-scan technology for UV exposure of photosensitive materials has been used for single or multiple-pass exposure applications. Gray-scale LDW can be applied to manufacture of 3-D optical structures, but the system requirements are substantially different, since edge slopes and surface departures must be controlled to within fractions of a wavelength.. In this paper, we explore the differences between binary and gray-scale raster imaging applied to micro-optic fabrication, and compare the system model with a prototype high-speed, gray-scale LDW tool that was developed from a Laser Direct Imaging tool originally designed for binary applications.

Paper Details

Date Published: 17 January 2003
PDF: 9 pages
Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.472908
Show Author Affiliations
John M. Tamkin, Optical Sciences Ctr./Univ. of Arizona (United States)
Brett Bagwell, Optical Sciences Ctr./Univ. of Arizona (United States)
Bradley T. Kimbrough, Optical Sciences Ctr./Univ. of Arizona (United States)
Ghassan Jabbour, Optical Sciences Ctr./Univ. of Arizona (United States)
Michael R. Descour, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 4984:
Micromachining Technology for Micro-Optics and Nano-Optics
Eric G. Johnson, Editor(s)

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