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Proceedings Paper

Out-of-plane rotary micromirrors for reconfigurable photonic applications
Author(s): Daryl J. Dagel; Olga Blum Spahn; James J. Allen; Shanalyn A. Kemme; Grant D. Grossetete; Fawn R. Gass
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Paper Abstract

A slow-speed optical fiber cross-connect has been developed around surface-micromachined MEMS mirrors that pop up 45 degrees relative to the substrate and rotate 360 degrees about the normal axis. Various assembly, latching, and rotational mechanisms have been evaluated and tested, with current work focusing on demonstrating functionality. Routing capability has been characterized for 2 × 2 arrays of micromirrors, the feedback from which has been applied to second-generation designs with improved control and greater precision. The cross-connect described here is scalable and represents an important building block in a general-purpose photonic infrastructure.

Paper Details

Date Published: 21 January 2003
PDF: 8 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); doi: 10.1117/12.472904
Show Author Affiliations
Daryl J. Dagel, Sandia National Labs. (United States)
Olga Blum Spahn, Sandia National Labs. (United States)
James J. Allen, Sandia National Labs. (United States)
Shanalyn A. Kemme, Sandia National Labs. (United States)
Grant D. Grossetete, Sandia National Labs. (United States)
Fawn R. Gass, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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