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Proceedings Paper

New fabrication of highly dense electromagnetic field microactuators and micro-optics for MOEMS applications
Author(s): Sheng-Chih Shen; Cheng-Tang Pan; Hwai-Pwu Chou; Ying-Ruel Huang
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Paper Abstract

A novel concept of perpendicular magnetic anisotropy is applied to electromagnetic micro-optical switch (EMOS). In the study, Fe/Pt equiatomic alloy thin film is potential high-density recording media and high-energy permanent magnetic because of their exceptional magnetic properties. EMOS combines of new type Fe/Pt alloy thin film, innovative design of closed magnetic circuit and single layer planar coil. The Fe/Pt alloy thin film and magnetic circuit with close loop is applied to concentrate the magnetic flux, increase magnetic force, and decrease switching time. In this EMOS, some important features are summarized as follows: (1) high magnetic force (>68mN); (2) low work voltage (<5V); and (3) short switching time (<0.4ms). The work demonstrates that EMOS can provide excellent performance than conventional magnetic microactuator.

Paper Details

Date Published: 17 January 2003
PDF: 8 pages
Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.472900
Show Author Affiliations
Sheng-Chih Shen, National Tsing Hua Univ. (Taiwan)
Industrial Technology Research Institute (Taiwan)
Cheng-Tang Pan, Industrial Technology Research Institute (Taiwan)
Hwai-Pwu Chou, National Tsing Hua Univ. (Taiwan)
Ying-Ruel Huang, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 4984:
Micromachining Technology for Micro-Optics and Nano-Optics
Eric G. Johnson, Editor(s)

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