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Proceedings Paper

Surface-micromachined tunneling-based accelerometer
Author(s): Runzi Chang; Min She
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Paper Abstract

A surface-micro-machined tunneling-based accelerometer has been designed. A simpler fabrication process has been proposed and illustrated. Performance optimization has been tried by tuning the tunneling tip, beam and proof-mass design.

Paper Details

Date Published: 16 January 2003
PDF: 4 pages
Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.472877
Show Author Affiliations
Runzi Chang, Univ. of California/Berkeley (United States)
Min She, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 4981:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Siegfried W. Janson, Editor(s)

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