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Proceedings Paper

High-Q RF coils on silicon-integrated circuits
Author(s): Christopher L. Chua; David K. Fork; Koenraad Van Schuylenbergh; Jeng-Ping Lu
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Paper Abstract

We report on out-of-plane micro-machined inductors exhibiting record high quality factors (Q) on silicon integrated circuits. The coils are made by three-dimensional self-assembly of stress-engineered structures fabricated with standard semiconductor batch processing techniques. Coils fabricated on low resistance CMOS-compatible silicon exhibit quality factors of over 70 at 1 GHz. BiCMOS test oscillators utilizing these micro-machined coils show significant phase noise reduction over similar oscillators using conventional spiral coils.

Paper Details

Date Published: 16 January 2003
PDF: 6 pages
Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.472875
Show Author Affiliations
Christopher L. Chua, Palo Alto Research Ctr. (United States)
David K. Fork, Palo Alto Research Ctr. (United States)
Koenraad Van Schuylenbergh, Palo Alto Research Ctr. (United States)
Jeng-Ping Lu, Palo Alto Research Ctr. (United States)


Published in SPIE Proceedings Vol. 4981:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Siegfried W. Janson, Editor(s)

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