Share Email Print
cover

Proceedings Paper

Emerging leadership of surface-micromachined MEMS for wavelength switching in telecommunication systems
Author(s): Bevan D. Staple; Lilac Muller; David C. Miller
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

We introduce the Network Photonics’ CrossWave as the first commercially-available, MEMS-based wavelength selective switch. The CrossWave combines the functionality of signal de-multiplexing, switching and re-multiplexing in a single all-optical operation using a dispersive element and 1-D MEMS. 1-D MEMS, where micromirrors are configured in a single array with a single mirror per wavelength, are fabricated in a standard surface micromachining process. In this paper we present three generations of micromirror designs. With proper design optimization and process improvements we have demonstrated exceptional mirror flatness (<16.2m-1 curvature), surface error (

Paper Details

Date Published: 16 January 2003
PDF: 9 pages
Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.472873
Show Author Affiliations
Bevan D. Staple, Network Photonics, Inc. (United States)
Lilac Muller, Network Photonics, Inc. (United States)
David C. Miller, Network Photonics, Inc. (United States)


Published in SPIE Proceedings Vol. 4981:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Siegfried W. Janson, Editor(s)

© SPIE. Terms of Use
Back to Top