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Proceedings Paper

Microfabricated recurve bimetallic actuator
Author(s): Proyag Datta; Madhulika Sathe; Lakshmi Namburi; Elizabeth J. Podlaha; Sumanta Acharya; Michael C. Murphy
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Paper Abstract

The objective of this work was to develop a thermally-driven bimetallic actuator for application in high temperature environments. The actuator was designed to drive distributed air flow control valves in a gas turbine combustor. The valves control localized cooling air flows in response to rises in temperature, leading to more uniform and complete combustion. The actuator is a passive thermo-mechanical device formed from bimorph elements concatenated in a recurve architecture to obtain the required forces and deflections. An electroplating process for depositing an Invar-like alloy in deep recess was developed and used in the fabrication of prototypes. Fabrication of additional protypes and testing are continuing.

Paper Details

Date Published: 16 January 2003
PDF: 12 pages
Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.472869
Show Author Affiliations
Proyag Datta, Louisiana State Univ. (United States)
Madhulika Sathe, Louisiana State Univ. (United States)
Lakshmi Namburi, Louisiana State Univ. (United States)
Elizabeth J. Podlaha, Louisiana State Univ. (United States)
Sumanta Acharya, Louisiana State Univ. (United States)
Michael C. Murphy, Louisiana State Univ. (United States)


Published in SPIE Proceedings Vol. 4981:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Siegfried W. Janson, Editor(s)

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