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Proceedings Paper

Single two-axis micromachined tilt mirror and linear array
Author(s): Michael R. Whitley; Jay A. Hammer; Zhili Hao; Brian Wingfield; Luis Nelson
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Paper Abstract

A scanning two-axis tilt mirror has been modeled, fabricated and tested. The tilt mirror device is fabricated from single crystal silicon using bulk micromachining technology. The mirror is octagonal and is suspended by outer torsion hinges, a gimbal, and inner torsion hinges. Response to a driving voltage is investigated, along with frequency response. Finite element modeling was performed and the results compared with experimental data, with good agreement. Using automated and semi-automated placement equipment, linear arrays of the tilt mirrors have been produced.

Paper Details

Date Published: 20 January 2003
PDF: 12 pages
Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003); doi: 10.1117/12.472858
Show Author Affiliations
Michael R. Whitley, MEMS Optical, Inc. (United States)
Jay A. Hammer, MEMS Optical, Inc. (United States)
Zhili Hao, MEMS Optical, Inc. (United States)
Brian Wingfield, MEMS Optical, Inc. (United States)
Luis Nelson, MEMS Optical, Inc. (United States)

Published in SPIE Proceedings Vol. 4985:
MOEMS Display and Imaging Systems
Hakan Urey, Editor(s)

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