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Proceedings Paper

Microstructure of titanium oxide thin films
Author(s): Rui-Ying Fan; Yue Mei Lu; Xiangyun Song
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Paper Abstract

Reported here are the TEM studies about the microstructures of TiO2 and Ti3O5 thin films thermally annealed at different temperatures and the microstructure change of TiO2 thin films before and after the laser-induced damage. Cross sectional TEM images of IAD deposited TiO2 singlelayer and TiO2/SiO2 multilayers are also observed and analyzed.

Paper Details

Date Published: 1 November 1991
PDF: 4 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47278
Show Author Affiliations
Rui-Ying Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Yue Mei Lu, Shanghai Institute of Optics and Fine Mechanics (China)
Xiangyun Song, Shanghai Institute of Ceramics (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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