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Proceedings Paper

Preparation of PbTiO3 thin film by dc single-target magnetron sputtering
Author(s): Bangchao Yang; Ju Yong Wang; Yu Ming Jia; Yongjie Huang
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Paper Abstract

This paper describes the preparation of PbTiO3 thin film by DC single-target magnetron reactive sputtering, which hasn't yet been reported. After many experiments, the best Pb/Te area ratio of the target has been found under a specified sputtering condition. The samples obtained are heat-treated to 600 degree(s)C and the x-ray diffraction patterns are observed. The authors have succeeded in preparing almost transparent and light yellow perovskite-type PbTiO3 with resistivity of 107(Omega) cm.

Paper Details

Date Published: 1 November 1991
PDF: 4 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47277
Show Author Affiliations
Bangchao Yang, Univ. of Electronic Science and Technology of China (China)
Ju Yong Wang, Univ. of Electronic Science and Technology of China (China)
Yu Ming Jia, Univ. of Electronic Science and Technology of China (China)
Yongjie Huang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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