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Proceedings Paper

Tunable Fabry-Perot interferometer for 3- to 4.5-um wavelength with bulk micromachined reflector carrier
Author(s): Steffen Kurth; Karla Hiller; Norbert Neumann; Matthias Heinze; Wolfram Doetzel; Thomas Gessner
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Paper Abstract

This contribution deals with design, fabrication and test of a micromachined first order Fabry-Perot-Interferometer (FPI) usable as tunable infrared filter in a spectrometer. The approach discussed here minimizes mirror curvature by using relative thick (300 μm Si ) mirror carriers for the fixed and the movable mirror of the FPI. We use thermally grown λ/4 thick SiO2 for antireflection layer at the mirror back side and for the first low refractive layer followed by a λ/4 thick polycrystalline silicon high refractive layer. Second and third λ/4 layer pairs of SiO2 and polycrystalline silicon complete the mirrors. The cavity size is electrostically tuned and capacitively detected by a closed loop control.

Paper Details

Date Published: 21 January 2003
PDF: 12 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); doi: 10.1117/12.472762
Show Author Affiliations
Steffen Kurth, Technische Univ. Chemnitz (Germany)
Karla Hiller, Technische Univ. Chemnitz (Germany)
Norbert Neumann, InfraTec GmbH (Germany)
Matthias Heinze, InfraTec GmbH (Germany)
Wolfram Doetzel, Technische Univ. Chemnitz (Germany)
Thomas Gessner, Technische Univ. Chemnitz (Germany)

Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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