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Proceedings Paper

Embossing of microscale features in Pb and Zn
Author(s): Dean J. Guidry; Dong Mei Cao; Tao Wang; Wen Jin Meng; Kevin W. Kelly
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Paper Abstract

Embossing of microscale features into Pb and Zn was carried out using LIGA (Lithographie, Galvanoformung, Abformung) fabricated Ni mold inserts with features 100 microns in diameter and 500 microns in height. Molding was carried out at 300 °C with both uncoated Ni inserts and Ni inserts coated with Ti-containing hydrocarbon (Ti-C:H). The coatings were applied using a high-density inductively coupled plasma (ICP) assisted hybrid chemical vapor deposition (CVD)/physical vapor deposition (PVD) technique. This technique is shown to produce coatings conformally onto LIGA fabricated high aspect ratio microstructures (HARMs). The performance of the molding process was characterized using scanning electron microscopy (SEM) and energy-dispersive x-ray spectroscopy both in terms of the features generated and the insert condition after molding. The present results indicate that in molding metals that are not reactive with Ni no coating is necessary to produce the microfeatures. This study also demonstrates that in molding Zn, where significant metal/insert chemical interactions exist, surface engineering of the mold insert is necessary to obtain satisfactory performance. Conformal deposition of engineered ceramic coatings onto Ni microscale mold inserts is an effective means for achieving micromolding of reactive metals.

Paper Details

Date Published: 15 January 2003
PDF: 9 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.472758
Show Author Affiliations
Dean J. Guidry, Mezzo Systems Inc. (United States)
Dong Mei Cao, Louisiana State Univ. (United States)
Tao Wang, Mezzo Systems Inc. (United States)
Wen Jin Meng, Louisiana State Univ. (United States)
Kevin W. Kelly, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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