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Proceedings Paper

Structure and optical properties of a-C:H/a-SiOx:H multilayer thin films
Author(s): Wei Ping Zhang; Jing Bao Cui; Shan Xie; Yi Zhou Song; Changsui Wang; Guien Zhou; Jian Xin Wu
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Paper Abstract

Amorphous multilayer thin film a-C:H/a-Si:H was deposited by magnetron sputtering. X-ray diffraction and Auger electron spectroscopy measurements indicate very well the periodicity of the sample. The shift and broadening of the photoluminescence peak are interpreted in light of quantum size effect.

Paper Details

Date Published: 1 November 1991
PDF: 3 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47274
Show Author Affiliations
Wei Ping Zhang, Univ. of Science and Technology of China (China)
Jing Bao Cui, Univ. of Science and Technology of China (China)
Shan Xie, Univ. of Science and Technology of China (China)
Yi Zhou Song, Univ. of Science and Technology of China (China)
Changsui Wang, Univ. of Science and Technology of China (China)
Guien Zhou, Univ. of Science and Technology of China (China)
Jian Xin Wu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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