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Proceedings Paper

Microfabrication services at INO
Author(s): Christine Alain; Hubert Jerominek; Patrice A. Topart; Timothy D. Pope; Francis Picard; Felix Cayer; Carl Larouche; Sebastien Leclair; Bruno Tremblay
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Paper Abstract

MEMS (Micro Electro Mechanical Systems) technology has expanded widely over the last decade in terms of its use in devices and instrumentation for diverse applications. However, access to versatile foundry services for MEMS fabrication is still limited. At INO, the presence of a multidisciplinary team and a complete tool set allow us to offer unique MEMS foundry-type services. These services include: design, prototyping, fabrication, packaging and testing of various MEMS and MOEMS devices. The design of a device starts with the evaluation of different structures adapted to a given application. Computer simulation tools, like IntelliSuite, ANSYS or custom software are used to evaluate the mechanical, optical, thermal and electromechanical performances. Standard IC manufacturing techniques such as metal, dielectric and semiconductor film deposition and etching as well as photolithographic pattern transfer are available. In addition, some unique techniques such as on-wafer lithography by laser writing, gray-scale mask lithography, thick photoresist lithography, selective electroplating, injection moulding and UV-assisted moulding are available to customers. The hermetic packaging and a novel patented wafer-level micropackaging are also applied. This multifaceted expertise has been utilized to manufacturing of several types of MEMS devices as well as complex instruments including micromirror-type devices, microfilters, IR microbolometric detector arrays, complete cameras and multipurpose sensors.

Paper Details

Date Published: 15 January 2003
PDF: 11 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.472738
Show Author Affiliations
Christine Alain, INO (Canada)
Hubert Jerominek, INO (Canada)
Patrice A. Topart, INO (Canada)
Timothy D. Pope, INO (Canada)
Francis Picard, INO (Canada)
Felix Cayer, INO (Canada)
Carl Larouche, INO (Canada)
Sebastien Leclair, INO (Canada)
Bruno Tremblay, INO (Canada)

Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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