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Proceedings Paper

Design and fabrication of a continuous membrane deformable mirror
Author(s): Jay A. Hammer; Michele Ruggiero Banish; Michael R. Whitley; Zhili Hao; Keith O. Warren; Sharon Sanchez; John S Harchanko
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Paper Abstract

Adaptive optics systems are used to maintain an optical system at its optimum performance through real time corrections of a wavefront. Deformable mirrors have traditionally been relatively large, expensive devices, suitable for systems such as large telescopes. The objective of the present work is to expand the range of systems that can employ adaptive optics by developing a small, low-cost MEMS deformable mirror. This deformable mirror uses a continuous membrane and has 61 actuators arranged in to approximate a circular pattern. Each actuator has an associated spring suspension, allowing it to push as well as pull on the membrane, producing locally convex or concave curvature. The folded springs are positioned so as to maximize the lateral stability. Maximum actuator displacement is six microns at less than 200 volts. The actuator resonant frequency, is greater than 10 kHz, allowing high-frequency updates of the mirror shape. To operate at high speed, the device must be sealed in a low-pressure environment. Each microactuator uses a vertical comb drive to achieve large travel at a reasonable voltage. The continuous membranes are made of silicon or silicon nitride. Both the actuator and membrane are fabricated with bulk micromachine process technologies. The design targets laser based communication specifications and medical imaging applications.

Paper Details

Date Published: 20 January 2003
PDF: 12 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); doi: 10.1117/12.472730
Show Author Affiliations
Jay A. Hammer, MEMS Optical, Inc. (United States)
Michele Ruggiero Banish, MEMS Optical, Inc. (United States)
Michael R. Whitley, MEMS Optical, Inc. (United States)
Zhili Hao, MEMS Optical, Inc. (United States)
Keith O. Warren
Sharon Sanchez, MEMS Optical, Inc. (United States)
John S Harchanko, MEMS Optical, Inc. (United States)


Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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