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Proceedings Paper

Reliability and qualification of an integrated MEMS attenuator for optical component applications
Author(s): Ryan Hickey; Heiko Fettig; James Wylde; Stephane J Legros; Robert E. Mallard; Heinz Nentwich; Christopher Hart
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Paper Abstract

This paper describes a test system and presents preliminary results of a long-term reliability study of an electro-thermally actuated integrated MEMS optical attenuator. These tests are designed to address the specific failure modes and life prediction models required for "set and forget" components and to identify deficiencies that exist in the current telecom (Telcordia) testing standards as they apply to MEMS. The failure modes are activated by overstressing the devices to a much higher power than would be observed under normal operating conditions. The paper describes a multi-module experimental test station for exciting devices at up eight different power levels, both AC and DC. At set intervals devices are tested off-board to measure changes in actuator deflection and resistance over time. The preliminary results show that devices start to degrade at power levels 92% over operating power after 400 hours of stress.

Paper Details

Date Published: 16 January 2003
PDF: 8 pages
Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); doi: 10.1117/12.472728
Show Author Affiliations
Ryan Hickey, Nortel Networks (Canada)
Heiko Fettig, Nortel Networks (Canada)
James Wylde, Nortel Networks (Canada)
Stephane J Legros, Nortel Networks (Canada)
Robert E. Mallard, Nortel Networks (Canada)
Heinz Nentwich, Nortel Networks (Canada)
Christopher Hart, Nortel Networks (Canada)

Published in SPIE Proceedings Vol. 4980:
Reliability, Testing, and Characterization of MEMS/MOEMS II
Rajeshuni Ramesham; Danelle M. Tanner, Editor(s)

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