Share Email Print
cover

Proceedings Paper

Dual-function leak detector for MEMS devices
Author(s): Yufeng Jin; Zhiping Wang; Zhen Feng Wang; X. Q. Shi; P. C. Lim; Min Miao; X. C. Shan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, the development of a dual-function leak detector is presented. The system consists of a laser interference instrument, a portable helium leakage detector, a specially designed test chamber with a quartz-glass observation window, a pressure gauge. The developed measuring system offers new features for experimental investigation on the integrity of hermetic sealed structure. Both helium bombing mode and diaphragm deflection mode were investigated using the developed detector. Basically, the system can be used for helium leak bombing detection. By employing this system for leakage detection in a micro optical switch, it was shown that a leakage of less than 10-7 std cc/sec can be measured. The system can also be used to measure the surface deflection of a diaphragm. The measurement was accomplished by using laser interference technique to monitor the pressure variation within the small cavity of MEMS devices after pressurized gas was introduced. A leakage as low as 10-14 std cc/sec could be detected for a sample with several cubic millimeter cavity of 10-4 mbar.

Paper Details

Date Published: 16 January 2003
PDF: 8 pages
Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); doi: 10.1117/12.472715
Show Author Affiliations
Yufeng Jin, Singapore Institute of Manufacturing Technology (Singapore)
Peking Univ. (China)
Zhiping Wang, Singapore Institute of Manufacturing Technology (Singapore)
Zhen Feng Wang, Singapore Institute of Manufacturing Technology (Singapore)
X. Q. Shi, Singapore Institute of Manufacturing Technology (Singapore)
P. C. Lim, Singapore Institute of Manufacturing Technology (Singapore)
Min Miao, Peking Univ. (China)
X. C. Shan, Singapore Institute of Manufacturing Technology (Singapore)


Published in SPIE Proceedings Vol. 4980:
Reliability, Testing, and Characterization of MEMS/MOEMS II
Rajeshuni Ramesham; Danelle M. Tanner, Editor(s)

© SPIE. Terms of Use
Back to Top