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Proceedings Paper

Algorithmic solutions for thermal and electrostatic simulation of MEMS
Author(s): Vladimir Szekely
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Paper Abstract

This paper is dealing with the field simulation problems of MEMS structures. Both thermal and electro-static fields are considered. Two simulation algorithms are investigated in details: the Fourier transformation method applied to multi-layer structures and the successive node reduction algorithm belonging to the family of FDM methods. Extensions of these methods are discussed, e.g. the application of the Fourier method to mixed lateral boundary conditions and methods for physical level/network model level co-simulation.

Paper Details

Date Published: 25 March 2003
PDF: 15 pages
Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); doi: 10.1117/12.472702
Show Author Affiliations
Vladimir Szekely, Budapest Univ. of Technology and Economics (Hungary)


Published in SPIE Proceedings Vol. 4945:
MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly
Bernard Courtois; Uwe F. W. Behringer; Ali M. Khounsary; Deepak G. Uttamchandani, Editor(s)

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