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Proceedings Paper

Optical emission spectroscopy in diamond-like carbon film deposition by glow discharge
Author(s): Wei Ping Zhang; Jing Chen; Rong Chuan Fang; Ke Ling Hu
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Paper Abstract

We have measured the optical emission spectra of glow discharge plasma of methane in the diamond-like carbon film deposition and analyzed the relationship between the optical emission spectra and deposition parameters, such as rf power and gas pressure. The infrared absorption of films has also been measured and compared with the results of optical emission spectra measurements.

Paper Details

Date Published: 1 November 1991
PDF: 3 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47266
Show Author Affiliations
Wei Ping Zhang, Univ. of Science and Technology of China (China)
Jing Chen, Univ. of Science and Technology of China (China)
Rong Chuan Fang, Univ. of Science and Technology of China (China)
Ke Ling Hu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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