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Proceedings Paper

New approach to obtain uniform thickness ZnS thin film interference filters
Author(s): Yuan Sheng Mei; Shi-Xuan Shang; Jin An Shan; Jian Gang Sun
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Paper Abstract

In very large-scale integrated circuits, the switch of semiconductor elements has a very fast speed, but the information transfer speed is lower than that of the switch, thus deterring the whole computing speed. For optical elements, the ability to solve the problem is evident. This is supported by several facts: high switch and transfer speed and independent transfer of optical information. Using ZnS, Na3AlF6 interference filter as optical switch elements, the uniform thickness of thin film is essential to the optical parallel processing. The theoretic model for vacuum vapor thin film thickness distribution has been given with some assumptions. In view of the practical vapor condition and the vapor material, some modification is needed. By using an addendum as a limit to allow only some molecules to reach the surface of substrate, a uniform thickness thin film can then be obtained.

Paper Details

Date Published: 1 November 1991
PDF: 4 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47259
Show Author Affiliations
Yuan Sheng Mei, Beijing Normal Univ. (China)
Shi-Xuan Shang, Beijing Normal Univ. (China)
Jin An Shan, Beijing Normal Univ. (China)
Jian Gang Sun, Beijing Normal Univ. (China)

Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang, Editor(s)

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