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Proceedings Paper

Soft X-UV silver silicon multilayer mirrors
Author(s): Jian-Da Shao; Zhengxiu Fan; Yong Hong Guo; Lei Jin
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Paper Abstract

In the soft x-ray domain (near 10 nm), the reported optical constants of silver and silicon are sufficiently different to make them attractive for a multilayer design. In this paper, design and fabrication of silver/silicon multilayer to be used as normal-incidence reflectors for 11.4 nm radiation are presented. Characterization of these multilayer structures was accomplished using Auger electron spectroscopy (AES) and little-angle x-ray diffraction (LXD). As a result of our experiments, we came to realize that silver/silicon multilayer can provide high quality structures and reach a certain reflectance.

Paper Details

Date Published: 1 November 1991
PDF: 4 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47258
Show Author Affiliations
Jian-Da Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Yong Hong Guo, Shanghai Institute of Optics and Fine Mechanics (China)
Lei Jin, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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