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Proceedings Paper

Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films
Author(s): Xing-Rong Zhao; Jianhua Hao; Fang Qiao Zhou; Han-Don Sun; Lingjie Wang; Xinjian Yi
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Paper Abstract

High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.

Paper Details

Date Published: 1 November 1991
PDF: 3 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47255
Show Author Affiliations
Xing-Rong Zhao, Huazhong Univ. of Science and Technology (China)
Jianhua Hao, Huazhong Univ. of Science and Technology (China)
Fang Qiao Zhou, Huazhong Univ. of Science and Technology (China)
Han-Don Sun, Huazhong Univ. of Science and Technology (China)
Lingjie Wang, Huazhong Univ. of Science and Technology (China)
Xinjian Yi, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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