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Proceedings Paper

New coating technology and ion source
Author(s): Yi Sin Yan
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Paper Details

Date Published: 1 November 1991
PDF: 2 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47254
Show Author Affiliations
Yi Sin Yan, Xi'an Institute of Technology (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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