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Proceedings Paper

Optical properties of oxide films prepared by ion-beam-sputter deposition
Author(s): Xuefei Tang; Zhengxiu Fan; ZhiJiang Wang
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Paper Abstract

TiO2 and ZrO2 coatings were prepared by ion beam sputter deposition. Refractive indices, optical absorptions, and laser-induced damage thresholds of the films were investigated. The optical absorptions of thin films are decreased obviously.

Paper Details

Date Published: 1 November 1991
PDF: 3 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47251
Show Author Affiliations
Xuefei Tang, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
ZhiJiang Wang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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