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Proceedings Paper

Research on influence of substrate to crystal growth by ion beams
Author(s): Dong Yin; Wen Xuan Guan; Shu Zi Sun; Zhao An Zhang
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Paper Abstract

The change of grain size and structure in several metal films on different substrate by Ar+ bombarding has been shown. The experimental results show that the size of film grain will become bigger and even form single crystal under special bombarding conditions. It is also found that some factors of substrate, such as lattice structure, lattice parameter, and deposited surface, etc., have a great influence upon its growth. A new mechanism of crystal growth has been investigated.

Paper Details

Date Published: 1 November 1991
PDF: 3 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47250
Show Author Affiliations
Dong Yin, Beijing Lab. of Vacuum Physics and Shengyang Institute of Technology (China)
Wen Xuan Guan, Beijing Lab. of Vacuum Physics and Shengyang Institute of Technology (China)
Shu Zi Sun, Beijing Lab. of Vacuum Physics and Shengyang Institute of Technology (China)
Zhao An Zhang, Beijing Lab. of Vacuum Physics and Shengyang Institute of Technology (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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