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Proceedings Paper

Advances in interferometric metrology
Author(s): James C. Wyant
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Paper Abstract

Modern electronics, computers, and software have made interferometry an extremely powerful tool in many fields including the testing of optical components and optical systems. This paper will discuss some of the recent advances in reducing the sensitivity of phase-shifting interferometers to vibration.

Paper Details

Date Published: 20 September 2002
PDF: 9 pages
Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.472495
Show Author Affiliations
James C. Wyant, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 4927:
Optical Design and Testing
Zhicheng Weng; Jose M. Sasian; Yongtian Wang, Editor(s)

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