Share Email Print
cover

Proceedings Paper

Temperature dependence of resistance of diamond film synthesized by microwave plasma CVD
Author(s): Bangchao Yang; Li Gou; Yu Ming Jia; Junguo Ran; Changqiong Zheng; Xia Tang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Diamond has many excellent properties, such as the greatest hardness (10000 kg/mm2), high thermal conductivity (5 times that of Copper at 20 degree(s)C), wide energy gap (5.5 eV), good chemical stability, etc. But for a long time, the shape and the high cost of diamond made by high-pressure, high-temperature method severely limit the application of the diamond in electronics and optics. Since the diamond film was synthesized, people began to study further the properties of the diamond film. It is expected to be a new kind of function material. This is a report of the temperature dependence of the resistance of the diamond film. The authors also attempted to prepare the thermistor made of polycrystal diamond film on silicon substrate.

Paper Details

Date Published: 1 November 1991
PDF: 2 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47249
Show Author Affiliations
Bangchao Yang, Univ. of Electronic Science and Technology of China (China)
Li Gou, Univ. of Electronic Science and Technology of China (China)
Yu Ming Jia, Univ. of Electronic Science and Technology of China (China)
Junguo Ran, Chengdu Univ. of Science and Technology (China)
Changqiong Zheng, Chengdu Univ. of Science and Technology (China)
Xia Tang, Chengdu Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang, Editor(s)

© SPIE. Terms of Use
Back to Top