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Proceedings Paper

Determination of optical constants of thin film in the soft x-ray region
Author(s): Yong Hong Guo; Zhengxiu Fan; Ouyang Bin; Lei Jin; Jian-Da Shao
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Paper Abstract

We presented a method of determining optical constants of a thin film using the reflectance R(theta) curve. Other parameters of the film, such as film thickness and roughness, are also determined with the derivation of the optical constants(n,k). To illustrate the method, the results of the film Al are given.

Paper Details

Date Published: 1 November 1991
PDF: 6 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47246
Show Author Affiliations
Yong Hong Guo, Institute of Opto-Electric Technology (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Ouyang Bin, Shanghai Institute of Optics and Fine Mechanics (China)
Lei Jin, Shanghai Institute of Optics and Fine Mechanics (China)
Jian-Da Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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