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Proceedings Paper

Preparation of superconducting Y-Ba-Cu-O thin films by rf magnetron sputtering
Author(s): Zong Tan Huang; Guozhen Li; Guangli Zeng; Jiang Ping Huang; Guilan Xiong
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Paper Abstract

Since the discovery of high Tc superconducting oxides, including YBa2Cu3Ox, thin films of these material have been paid much attention due to their application potential in electronic devices. Several techniques have been employed to prepare superconducting thin films. Among them, sputtering technique using a single oxide target is one of the simplest and most useful methods. For our purpose, which is using superconducting thin films in some electronic devices, sputtering technique is presumably the best method for the deposition of thin films because of its controllability of film thickness, surface smoothness, homogeneity in quality, and tight sticking to the substrate and other layers. In this work, the authors have attempted to deposit YBa2Cu3Ox superconducting thin films by rf magnetron sputtering technique and tried to use them in some electronic devices.

Paper Details

Date Published: 1 November 1991
PDF: 2 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47237
Show Author Affiliations
Zong Tan Huang, Kunming Institute of Physics (China)
Guozhen Li, Kunming Institute of Physics (China)
Guangli Zeng, Kunming Institute of Physics (China)
Jiang Ping Huang, Kunming Institute of Physics (China)
Guilan Xiong, Kunming Institute of Physics (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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