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Proceedings Paper

V-grooves on LiNbO3 for passive fiber alignment
Author(s): Qihong Lou; Zhenhuan Ye; T. Li; Jinxing Dong
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Paper Abstract

A relative good and economical method has been presented to fabricate V-grooves on LiNbO3 crystal for passive fiber alignment. It ha been experimentally investigated of excimer laser ablated V-grooves on LiNbO3 crystal. Two excimer lasers were employed for comparison experiment with the wavelength of 308nm and 193nm respectively. It has been shown that 308nm wavelength performed a poor role in fabricating grooves on LiNbO3 crystal, particularly on both ablation sped and surface quality, while 193nm wavelength showed excellent performance. The corresponding ablation threshold of LiNbO3 crysatl at 193nm has been found to be as low as 0.5J/cm2. At laser fluence of 3J/cm2 and 1200 shots of laser irradiation, V-grooves with some 130 micrometers have been fabricated without visible damage near the grooves. Oxygen buffering atmosphere has been utilized for improving ablation surface cleansing.

Paper Details

Date Published: 1 July 2002
PDF: 4 pages
Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472360
Show Author Affiliations
Qihong Lou, Shanghai Institute of Optics and Fine Mechanics (China)
Zhenhuan Ye, Shanghai Institute of Optics and Fine Mechanics (China)
T. Li, Shanghai Institute of Optics and Fine Mechanics (China)
Jinxing Dong, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4688:
Emerging Lithographic Technologies VI
Roxann L. Engelstad, Editor(s)

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