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Proceedings Paper

Characterization and characteristics of a ULE glass tailored for EUVL needs
Author(s): Kenneth E. Hrdina; Benjamin Z. Hanson; Philip M. Fenn; Robert Sabia
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Paper Abstract

The EUVL industry has unique material requirements, which are being addressed. Implementation of metrology methods new to ULE Glass will be discussed along with material characteristics altered to meet the needs of EUVL. Metrology methods include multiple means of evaluating the striae, CTE and inclusions. Material characteristics have been altered to better meet the demands of the industry. The reduction in inclusion levels along with other improvements such as in the area of striae will be discussed here. Improvements of greater than 4x were achieved in these preliminary striae reduction trials.

Paper Details

Date Published: 1 July 2002
PDF: 8 pages
Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472321
Show Author Affiliations
Kenneth E. Hrdina, Corning Inc. (United States)
Benjamin Z. Hanson, Corning Inc. (United States)
Philip M. Fenn, Corning Inc. (United States)
Robert Sabia, Corning Inc. (United States)


Published in SPIE Proceedings Vol. 4688:
Emerging Lithographic Technologies VI
Roxann L. Engelstad, Editor(s)

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