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Proceedings Paper

Nanotechnologies and nanolithography in Europe
Author(s): Jean Charles Guibert
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Paper Abstract

European microelectronics industry recovered a strong position within last years, thanks in part to large cooperative programs involving both national and European funding. But, keeping in-line with Moore's law, entering the nano-era requires an increasingly effort in research and development. And for this, Europe again has specific strengths due to the synergy between national and European level initiatives. In the first part of this presentation, we will describe some funding programs and mechanisms for nanotechnologies in Europe, then we will cover some key results of European labs involved in this field and will point out large national initiatives aiming to set-up European centers of excellence in the field of nanotechnologies. In the second part, we will look in depth into the nanolithography activities in Europe, which in fact cover a broad spectrum of technologies, from electron-beam to extreme UV, including nanoimprint or more innovative concepts.

Paper Details

Date Published: 1 July 2002
PDF: 10 pages
Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472291
Show Author Affiliations
Jean Charles Guibert, CEA-LETI (France)

Published in SPIE Proceedings Vol. 4688:
Emerging Lithographic Technologies VI
Roxann L. Engelstad, Editor(s)

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